MEMS Tunable Gratings with Analog Actuation

MEM Analog Tunable Gratings by Electrostatic Actuation

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed...

Analog tunable electrostatic and piezoelectric diffractive gratings

We have designed and fabricated tunable gratings with period tunable to within fraction of a micrometer. We actuated the gratings by electrostatic and piezoelectric means, and demonstrated period changes of order 1nm. Introduction Optical MEMS devices have included micro-mirrors [1, 2], tunable gratings, tunable Fabry-Perot resonators, etc. For example, Silicon Light Machines has commercialized...

A Tunable Miniaturized RF MEMS Resonator With Simultaneous High Q (500-735) and Fast Response Speed (< 10-60 mu s)

This paper reports on the design, fabrication, and measurement of a novel radio frequency (RF) microelectromechanical systems (MEMS) tunable all-silicon evanescent-mode cavity-based resonator that simultaneously achieves high quality factor and fast response speed. The resonator is based on a 1.5-mm-deep silicon-etched cavity attached to a gold-coated silicon substrate with an array of 75 185-μ...

21.69-24.36 GHz MEMS Tunable Band-Pass Filter

The K-band microelectromechanical systems (MEMS) tunable band-pass filter, with a wide-frequency tunable range and miniature size, is able to fulfill the requirements of the multiband satellite communication systems. A novel 21.69–24.36 GHz MEMS tunable band-pass filter is designed, analyzed, fabricated and measured. This paper also designs and analyzes an inductively tuned slow-wave resonator,...